RIE and DRIE equipment.
Chemical banks for micro/nanotechnologies.
CVD nitride and oxide passivation equipment.
Optical photolithography equipment.
Platinum and gold deposition equipment.
Thermal oxidation process equipment.
Malvern Morphologi G3 for advanced particle morphologi characterization
Contact Angel (OCA15 plus).
Microarrayer SPOTBOT2
UV Curing Lapm System
